High resolution germanium zone plates and apertures for soft x-ray focalometryD. M. Tennant, R. W. Epworth, M. L. O’Malley et al.|Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena|1990Cited by 28
20:1 projection soft x-ray lithography using trilevel resistT. E. Jewell, John H. Bruning, Marco Becker et al.|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|1990Cited by 14
Free standing silicon microstructures for soft x-ray masks and cold atom focusingD. M. Tennant, R. W. Epworth, J. E. Bjorkholm et al.|Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena|1990Cited by 12