Free standing silicon microstructures for soft x-ray masks and cold atom focusing

D. M. Tennant(University of Tennessee at Knoxville), R. W. Epworth, M. L. O’Malley(AT&T (United States)), Marco Becker(AT&T (United States)), J. E. Bjorkholm(AT&T (United States)), J. Greguš(AT&T (United States))

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

November 1, 1990

10.1116/1.584886

Cited by 12

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