Focused-Ion-Beam-Assisted Magnet Fabrication and Manipulation for Magnetic Field Detection ApplicationsHumberto Campanella, J.A. Plaza, Marta Duch et al.|ACS Applied Materials & Interfaces|2009Cited by 6
Nanomagnet fabrication on FBAR for magnetic sensor applicationsHumberto Campanella, H. Guerrero, Jordi Llobet et al.|Unknown|2009Cited by 6
In situ MEMS gradiometer with nanometer-resolution optical detection systemHumberto Campanella, J.A. Plaza, R. P. del Real et al.|Sensors and Actuators A Physical|2010Cited by 2
Comparative performance of static-mode ferrous MEMS gradiometers fabricated by a three-step DRIE processHumberto Campanella, J.A. Plaza, Marina Díaz-Michelena et al.|Journal of Micromechanics and Microengineering|2010Cited by 0