Nanomagnet fabrication on FBAR for magnetic sensor applications
Humberto Campanella(Instituto Nacional de Técnica Aeroespacial), H. Guerrero(Instituto Nacional de Técnica Aeroespacial), R. P. del Real(Instituto de Ciencia de Materiales de Madrid), J. Estéve(Institut de minéralogie, de physique des matériaux et de cosmochimie), Marina Díaz-Michelena(Alcoa (United States)), Marta Duch(Instituto Nacional de Técnica Aeroespacial), J.A. Plaza(Instituto Nacional de Técnica Aeroespacial), Jordi Llobet(Institut de Microelectrònica de Barcelona)
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