Comparative performance of static-mode ferrous MEMS gradiometers fabricated by a three-step DRIE process
Humberto Campanella(Instituto Nacional de Técnica Aeroespacial), J.A. Plaza(Instituto Nacional de Técnica Aeroespacial), R. P. del Real(Instituto de Ciencia de Materiales de Madrid), Marina Díaz-Michelena(Alcoa (United States)), Marta Duch(Instituto Nacional de Técnica Aeroespacial), J. Estéve(Institut de minéralogie, de physique des matériaux et de cosmochimie), H. Guerrero(Instituto Nacional de Técnica Aeroespacial)
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