Vacancy and interstitial depth profiles in ion-implanted siliconPatrick Lévêque, V. Privitera, Bengt Svensson et al.|Journal of Applied Physics|2003Cited by 25
Identification of hydrogen related defects in proton implanted float-zone siliconPatrick Lévêque, V. Privitera, Anders Hallén et al.|The European Physical Journal Applied Physics|2002Cited by 17