Identification of hydrogen related defects in proton implanted float-zone silicon
Patrick Lévêque(KTH Royal Institute of Technology), V. Privitera(Institute for Microelectronics and Microsystems), J. Wong‐Leung(Australian National University), C. Jagadish(Australian National University), Anders Hallén(KTH Royal Institute of Technology), B. G. Svensson(KTH Royal Institute of Technology)
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