High performance La-doped HZO based ferroelectric capacitors by interfacial engineering
M. Popovici(IMEC), Gouri Sankar Kar(IMEC), R.K. Ramachandran(ASM International (Belgium)), Michael Givens(ASM International (Belgium)), A. Leonhardt(ASM International (Finland)), A. Walke(IMEC), Umberto Celano(Arizona State University), Jan Van Houdt(IMEC), S. Mukherjee(IMEC), Paola Favia(IMEC), Romain Delhougne(IMEC), Md Nur K. Alam(IMEC), A. Illiberi(ASM International (Belgium)), Jasper Bizindavyi(IMEC), Olivier Richard(IMEC), Sergiu Clima(IMEC)
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