Low-Temperature (70°C) Cu-to-Cu Direct Bonding by Capping Metal Layers

Demin Liu(National Yang Ming Chiao Tung University), Kuan‐Neng Chen(National Yang Ming Chiao Tung University), Hanwen Hu(North Sichuan Medical University), Yuwei Liu(National Yang Ming Chiao Tung University), Po‐Chih Chen(National Yang Ming Chiao Tung University)
IEEE Electron Device Letters
August 16, 2021
Cited by 29


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