Non-destructive characterization of extended crystalline defects in confined semiconductor device structures
Andreas Schulze(IMEC), Matty Caymax(IMEC), Wilfried Vandervorst(Imec the Netherlands), Roger Loo(IMEC), Libor Strakoš(Thermo Fisher Scientific (Czechia)), T. Vystavěl(Thermo Fisher Scientific (Czechia)), Antoine Pacco, Nadine Collaert(IMEC)
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