Dopant, composition and carrier profiling for 3D structures

Wilfried Vandervorst(IMEC), A. Budrevich(Intel (United States)), Umberto Celano(Arizona State University), Janusz Bogdanowicz(IMEC), Kristof Paredis(IMEC), Claudia Fleischmann(IMEC), Alexis Franquet(IMEC)
Materials Science in Semiconductor Processing
October 24, 2016
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