Effects of Plasma-$\hbox{PH}_{3}$ Passivation on Mobility Degradation Mechanisms of $\hbox{In}_{0.53} \hbox{Ga}_{0.47}\hbox{As}$ nMOSFETs

Sumarlina Azzah Bte Suleiman(National University of Singapore), Sungjoo Lee(Tohoku University), Hoon-Jung Oh(National University of Singapore)
IEEE Transactions on Electron Devices
March 8, 2012
Cited by 3


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