Failure mechanisms and optimum design for electroplated copper Through-Silicon Vias (TSV)

Xi Liu(Georgia Institute of Technology), Suresh K. Sitaraman(Georgia Institute of Technology), Rao Tummala(Georgia Institute of Technology), Ritwik Chatterjee(Georgia Institute of Technology), Pradeep Dixit(Georgia Institute of Technology), Qiao Chen(Georgia Institute of Technology)
Unknown
May 1, 2009
Cited by 172


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