Failure analysis of through-silicon vias in free-standing wafer under thermal-shock test

Xi Liu(Georgia Institute of Technology), Suresh K. Sitaraman(Georgia Institute of Technology), Rao Tummala(Georgia Institute of Technology), Qiao Chen(Georgia Institute of Technology), Venkatesh Sundaram(Georgia Institute of Technology)
Microelectronics Reliability
July 31, 2012
Cited by 81


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