Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples

R. J. Stephenson(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), Anne S. Verhulst(IMEC), Peter Wolf(Bruker (United States))
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
January 1, 2000
Cited by 26


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