Atomic Force Microscopy and Infrared Spectroscopy Studies of Hydrogen Baked Si Surfaces
O. Vatel(IMEC), Marc Heyns Marc Heyns(IMEC), Matty Caymax(IMEC), Bert Vermeire(IMEC), H. Bender(IMEC), Frederic Chollet, Paul Mertens(IMEC), E. André, Steven Verhaverbeke(IMEC)
Cited by 24
Related Papers
Three-Dimensional Observation of the Conductive Filament in Nanoscaled Resistive Memory Devices
|Nano Letters|2014|338
Effective electrical passivation of Ge(100) for high-k gate dielectric layers using germanium oxide
|Applied Physics Letters|2007|271
Germanium MOSFET Devices: Advances in Materials Understanding, Process Development, and Electrical Performance
|Journal of The Electrochemical Society|2008|267
High-k dielectrics for future generation memory devices (Invited Paper)
|Microelectronic Engineering|2009|252