Achieving 63 pm Resolution in Scanning Transmission Electron Microscope with Spherical Aberration Corrector

Hidetaka Sawada(JEOL (Japan)), Kunio Takayanagi(Tokyo Institute of Technology), Yoshifumi Oshima(Tokyo Institute of Technology), Takumi Sannomiya(JEOL (Japan)), Naoki Yamamoto(Tokyo Institute of Technology), Y. Tanishiro(Tokyo Institute of Technology), Yukihito Kondo(JEOL (Japan)), M Kawazoe(JEOL (Japan)), Takeshi Tomita(JEOL (Japan)), T. Kaneyama(JEOL (Japan)), Fumio Hosokawa(JEOL (Japan)), Takayuki Tanaka(Shanghai Shipbuilding Technology Research Institute), M Terao(JEOL (Japan)), Toshihiro Ishizawa(JEOL (Japan))
Japanese Journal of Applied Physics
June 1, 2007
Cited by 64


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