Epitaxial staircase structure for the calibration of electrical characterization techniques
Trudo Clarysse(IMEC), G. Neubauer(Intel (United States)), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), J. S. McMurray(University of Utah), Jungkyu Kim(Texas Tech University), C. C. Williams(University of Utah), J. G. Clark(University of Liverpool), Peter Wolf(Bruker (United States)), Thomas Trenkler(IMEC)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
January 1, 1998
Cited by 70
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