Growth of strained Si on He ion implanted Si/SiGe heterostructures
Dan Buca(Forschungszentrum Jülich), H.‐E. Schaefer(University of Stuttgart), Matty Caymax(IMEC), Roger Loo(IMEC), S. Feste(Forschungszentrum Jülich), R. Carius(Forschungszentrum Jülich), B. Holländer, S. Mantl(Forschungszentrum Jülich)
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