Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer

Romain Delhougne(IMEC), Wilfried Vandervorst(Imec the Netherlands), Roger Loo(IMEC), Matty Caymax(IMEC), Philippe Meunier-Beillard(Philips (Belgium))
Applied Surface Science
October 11, 2003
Cited by 31


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