Differential Hall characterisation of ultrashallow doping in advanced Si-based materials
Nick S. Bennett(University of Surrey), M. Bersani(Fondazione Bruno Kessler), T.C.Q. Noakes(Daresbury Laboratory), Andrew J. Smith(Intel (United States)), R. Gwilliam(University of Surrey), N. E. B. Cowern(University of Surrey), B.J. Sealy(University of Surrey), M. Kah(University of Surrey), Paul Bailey(Daresbury Laboratory), D. Giubertoni(Fondazione Bruno Kessler)
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