The role of oxygen on the stability of gettering of metals to cavities in silicon

J. S. Williams(University of Illinois Urbana-Champaign), D. C. Jacobson(AT&T (United States)), Richard A. Brown(The University of Texas at Austin), Prakash N. K. Deenapanray(Australian National University), M. Petravić(Australian National University), M. Conway(Australian National University), D. J. Eaglesham, J. Wong‐Leung(Australian National University)
Applied Physics Letters
October 18, 1999
Cited by 25


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