M. Conway

10 papers and 114 citations.

10Publications

114Total Citations

Top publicationsby citations

Interaction of defects and metals with nanocavities in silicon

J. S. Williams, Y. Hayashi, H. Bernas et al.|Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms|2001

Cited by 30

Direct observation of voids in the vacancy excess region of ion bombarded silicon

J. S. Williams, J. Wong‐Leung, M. Conway et al.|Applied Physics Letters|2001

Cited by 29

The role of oxygen on the stability of gettering of metals to cavities in silicon

J. S. Williams, D. C. Jacobson, M. Petravić et al.|Applied Physics Letters|1999

Cited by 25

Effect of implant temperature on secondary defects created by MeV Sn implantation in silicon

J. Wong‐Leung, J. D. Fitz Gerald, C. Jagadish et al.|Journal of Applied Physics|2001

Cited by 16

Analysis of semiconductors by ion channelling: Applications and pitfalls

J. S. Williams, J. Wong‐Leung, M. Conway et al.|Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms|1998

Cited by 7

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