Enhanced Performance of PMOS MUGFET via Integration of Conformal Plasma-Doped Source/Drain Extensions
D. Lenoble(IMEC), M. Jurczak(IMEC), Svetlana Radovanov(Whale Center of New England), P. Eybens(IMEC), S. Brus(University of Liège), Christophe Cardinaud(Centre National de la Recherche Scientifique), Nadine Collaert(IMEC), T. Skotnicki(STMicroelectronics (Switzerland)), Wilfried Vandervorst(Imec the Netherlands), Danielle Vanhaeren(IMEC), A. De Keersgieter(IMEC), Ludovic Godet(Nantes Université), M. W. Goodwin(Texas Instruments (United States)), K. Anil(IMEC), Paul Zimmerman(Intel (United States)), R. Rooyackers(IMEC), S. Biesemans(IMEC)
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