PMOS device performance improvement by using buried contact implantsShu Qin, Allen McTeer, L. J. Liu et al.|Unknown|2012Cited by 5
PMOS device performance improvement using buried contact implantsShu Qin, Jim Browning, Daniel D. Stancil et al.|Workshop on Microelectronics and Electron Devices|2012Cited by 3
[Poster Session: 2012 IEEE Workshop on Microelectronics and Electron Devices (WMED)]Shu Qin, Jim Browning, M. Mitkova et al.|Unknown|2012Cited by 3
Two-Dimensional Cross-Sectional Doping Profile Study of Low Energy High Dose Ion Implantations Using High Vacuum Scanning Spreading Resistance Microscopy (HV-SSRM) and Electron HolographyShu Qin, Yongjun Hu, Allen McTeer et al.|AIP conference proceedings|2011Cited by 2
Two-dimensional cross-sectional doping profiling of boron-based low energy high dose ion implantations using Electron Holography techniqueShu Qin, Jaydip Guha, Zhouguang Wang et al.|Unknown|2010Cited by 0