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Gowri P. Kota

Lam Research (United States)

2 papers and 12 citations.

2Publications

12Total Citations

Top publicationsby citations

<title>Advanced process control for poly-Si gate etching using integrated CD metrology</title>

Gowri P. Kota, Ady Levy, Thaddeus G. Dziura et al.|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|2003

Cited by 9

Advanced process control applied to 90-nm lithography and etch

Gowri P. Kota, Adolph Hunter, Jorge Luque et al.|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|2003

Cited by 3

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