Kevin D. Krenz

2 papers and 22 citations.

2Publications

22Total Citations

Top publicationsby citations

Printability of substrate and absorber defects on extreme ultraviolet lithographic masks

K. B. Nguyen, David L. Windt, A. K. Raychaudhuri et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1995

Cited by 11

Fabrication of metal–oxide–semiconductor devices with extreme ultraviolet lithography

K. B. Nguyen, Linus A. Fetter, Kurt W. Berger et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1996

Cited by 11

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