The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substratesDavid C. Miller, Martin L. Dunn, Dragos Seghete et al.|Journal of Applied Physics|2009Cited by 112
Thermo-mechanical properties of alumina films created using the atomic layer deposition techniqueDavid C. Miller, Martin L. Dunn, Ross R. Foster et al.|Sensors and Actuators A Physical|2010Cited by 100
Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer depositionDavid C. Miller, Martin L. Dunn, Steven M. George et al.|Acta Materialia|2009Cited by 46