Thermo-mechanical properties of alumina films created using the atomic layer deposition technique

David C. Miller(Defense Advanced Research Projects Agency), Martin L. Dunn(University of Denver), Steven M. George(University of Colorado Boulder), Ross R. Foster(Defense Advanced Research Projects Agency), Jacob A. Bertrand(Defense Advanced Research Projects Agency), Yung-Cheng Lee(University of Colorado Boulder), Arthur S. Morris(Defense Advanced Research Projects Agency), Shawn Cunningham(Defense Advanced Research Projects Agency), Shih‐Hui Jen(Defense Advanced Research Projects Agency)
Sensors and Actuators A Physical
September 30, 2010
Cited by 100


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