Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition

David C. Miller(Defense Advanced Research Projects Agency), Martin L. Dunn(University of Denver), Shih‐Hui Jen(Defense Advanced Research Projects Agency), Steven M. George(University of Colorado Boulder), Ross R. Foster(Defense Advanced Research Projects Agency), Jacob A. Bertrand(Defense Advanced Research Projects Agency), Yung-Cheng Lee(University of Colorado Boulder), Byunghoon Yoon(University of Colorado Boulder), Dragos Seghete(Defense Advanced Research Projects Agency)
Acta Materialia
August 7, 2009
Cited by 46


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