The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substratesDavid C. Miller, Martin L. Dunn, Dragos Seghete et al.|Journal of Applied Physics|2009Cited by 112
Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer depositionYadong Zhang, Yung-Cheng Lee, Dragos Seghete et al.|Surface and Coatings Technology|2010Cited by 56
Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer depositionDavid C. Miller, Martin L. Dunn, Steven M. George et al.|Acta Materialia|2009Cited by 46