Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition

Yadong Zhang(University of Colorado Boulder), Yung-Cheng Lee(University of Colorado Boulder), Dragos Seghete(Defense Advanced Research Projects Agency), Ronggui Yang(Huazhong University of Science and Technology), Zachary M. Gibbs(University of Colorado Boulder), Andrew S. Cavanagh(University of Colorado Boulder), Steven M. George(University of Colorado Boulder), А. И. Абдулагатов(Defense Advanced Research Projects Agency)
Surface and Coatings Technology
December 5, 2010
Cited by 56


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