Process optimization for production of sub-20 nm soft x-ray zone plates

S. J. Spector(Alcatel Lucent (Germany)), D. M. Tennant(University of Tennessee at Knoxville), Chris Jacobsen(Argonne National Laboratory)

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

November 1, 1997

10.1116/1.589747

Cited by 125

Related Papers

Proximate Kitaev quantum spin liquid behaviour in a honeycomb magnet

|Unknown|2016|863

Neutron scattering in the proximate quantum spin liquid α-RuCl <sub>3</sub>

|Science|2017|724

Quantum Criticality in an Ising Chain: Experimental Evidence for Emergent E <sub>8</sub> Symmetry

|Science|2010|722

Discrete Resistance Switching in Submicrometer Silicon Inversion Layers: Individual Interface Traps and Low-Frequency (<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mfrac><mml:mrow><mml:mn>1</mml:mn></mml:mrow><mml:mrow><mml:mi>f</mml:mi></mml:mrow></mml:mfrac></mml:math>?) Noise

|Physical Review Letters|1984|711

Dirac Strings and Magnetic Monopoles in the Spin Ice Dy <sub>2</sub> Ti <sub>2</sub> O <sub>7</sub>

|Science|2009|607