Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancementChen–Fu Chien, Shih‐Chung Chuang, Chiao-Wen Liu|International Journal of Production Research|2015Cited by 89
A Framework for Root Cause Detection of Sub-Batch Processing System for Semiconductor Manufacturing Big Data AnalyticsChen–Fu Chien, Shih‐Chung Chuang|IEEE Transactions on Semiconductor Manufacturing|2014Cited by 77