Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement
Chen–Fu Chien(National Tsing Hua University), Shih‐Chung Chuang(National Tsing Hua University), Chiao-Wen Liu(National Tsing Hua University)
Cited by 89
Related Papers
A Framework for Root Cause Detection of Sub-Batch Processing System for Semiconductor Manufacturing Big Data Analytics
|IEEE Transactions on Semiconductor Manufacturing|2014|77
A framework for nonparametric profile monitoring
|Computers & Industrial Engineering|2012|36
Nonparametric profile monitoring in multi-dimensional data spaces
|Journal of Process Control|2012|24
Estimation and monitoring of traffic intensities with application to control of stochastic systems
|Applied Stochastic Models in Business and Industry|2012|6