C

Christopher J. Von Benken

K Lab (United States)

2 papers and 15 citations.

2Publications

15Total Citations

Top publicationsby citations

<title>Rapid integrated circuit delayering without grass</title>

William E. Vanderlinde, Addison R. Crockett, Christopher J. Von Benken|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|1996

Cited by 11

Fast, Clean and Low Damage Deprocessing Using Inductively Coupled and RIE Plasmas

William E. Vanderlinde, Addison R. Crockett, Christopher J. Von Benken et al.|Proceedings - International Symposium for Testing and Failure Analysis|1996

Cited by 4

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