<title>Rapid integrated circuit delayering without grass</title>William E. Vanderlinde, Addison R. Crockett, Christopher J. Von Benken|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|1996Cited by 11
Fast, Clean and Low Damage Deprocessing Using Inductively Coupled and RIE PlasmasWilliam E. Vanderlinde, Addison R. Crockett, Christopher J. Von Benken et al.|Proceedings - International Symposium for Testing and Failure Analysis|1996Cited by 4