An energy-efficient FeFET-based computing-in-memory macro using BEOL-integrated HZO ferroelectric capacitors
Weizeng Li(Chinese Academy of Sciences), Chunmeng Dou(Chinese Academy of Sciences), Linfang Wang(Chinese Academy of Sciences), Hanghang Gao(Chinese Academy of Sciences), Zhidao Zhou(Chinese Academy of Sciences), Wang Ye(Chinese Academy of Sciences), Junyu Zhu(Chinese Academy of Sciences), Haiyao Hu(Chinese Academy of Sciences), Bo Wang(Chinese Academy of Sciences), Zhi Li(Chinese Academy of Sciences), Zhongze Han(Chinese Academy of Sciences)
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