Liquid film shearing polishing for high quality and low damage tungsten surface: Process optimization, removal mechanism, and processing defects

Binbin Hong(Zhejiang University of Technology), Binghai Lyu(Zhejiang University of Technology), Xingzhong Cao(Chinese Academy of Sciences), Xiaoyu Zhao(Hangzhou Dianzi University), Peng Zhang(Chinese Academy of Sciences), Haifeng Li(University of Macau), Te Zhu(Hefei University of Technology), Yiyang Chen(Hefei University of Technology), Hongyu Chen(Kunming University of Science and Technology), Pengqi Chen(Hefei University of Technology), Laima Luo(Hefei University of Technology)
International Journal of Refractory Metals and Hard Materials
April 14, 2025
Cited by 17


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