Microwave plasma modification-assisted shear-thickening polishing of single-crystal silicon carbide
Mingjie Shen(Shaanxi University of Science and Technology), Wei Hang(Zhejiang University of Technology), Hongyu Chen(Kunming University of Science and Technology), Min Wei(Zhejiang University of Technology), Jiahao Ye(Zhejiang University of Technology), Chuansheng Wang(Southern University of Science and Technology), Lingwei Wu(Zhejiang University of Technology), Hui Deng(Southern University of Science and Technology), Julong Yuan(Zhejiang University of Technology), Binghai Lyu(Zhejiang University of Technology)
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