A novel liquid film shearing polishing technique for silicon carbide and its processing damage mechanisms
Hongyu Chen(Kunming University of Science and Technology), Binghai Lyu(Zhejiang University of Technology), Binbin Hong(Zhejiang University of Technology), Peng Zhang(Chinese Academy of Sciences), Xuefeng Han(Zhejiang University), Wei Hang(Zhejiang University of Technology), Te Zhu(Hefei University of Technology), Rong Wang(Zhejiang University), Xingzhong Cao(Chinese Academy of Sciences), Hongbing Wan(Zhejiang University of Technology), Qiu Xu(Kyoto University)
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