High-Yield Enhancement-Mode GaN <i>p</i>-FET With Etching-Target Layer and High-Selectivity Etching Techniques
Weisheng Wang(Xi’an Jiaotong-Liverpool University), Yuanlei Zhang(Xi’an Jiaotong-Liverpool University), Zhenghao Chen(Kyoto University), Kain Lu Low(University of Liverpool), Zhiwei Sun(Xi’an Jiaotong-Liverpool University), Jia-Chen Duan(Xi’an Jiaotong-Liverpool University), Jie Zhang(Army Medical University), Lisheng Zhang(Capital Normal University), Xuelin Yang(Peking University)
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