Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors

Kwan‐Ho Kim(Korea Telecom (South Korea)), Deep Jariwala(California University of Pennsylvania), Nicholas Trainor(Pennsylvania State University), Gwangwoo Kim(University of Pennsylvania), Zichen Tang(University of Pennsylvania), Joan M. Redwing(Pennsylvania State University), Keshava Katti(University of Pennsylvania), Yi Wan(King Abdullah University of Science and Technology), Jui‐Han Fu(The University of Tokyo), Hyong Min Kim(University of Pennsylvania), Jeffrey Zheng(Yunnan University), Roy H. Olsson(University of Pennsylvania), Vincent Tung(California NanoSystems Institute), Pariasadat Musavigharavi(University of Pennsylvania), Eric A. Stach(University of Pennsylvania), Merrilyn Mercy Adzo Fiagbenu(University of Pennsylvania), Seunguk Song(University of Pennsylvania), Pawan Kumar(The University of Texas at Austin), Areej Aljarb(King Abdulaziz University), Seyong Oh(Hanyang University), Mariam Hakami(The University of Tokyo)
Nature Nanotechnology
May 22, 2023
Cited by 209


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