Novel Channel-First Fishbone FETs With Symmetrical Threshold Voltages and Balanced Driving Currents Using Single Work Function Metal Process

Lei Cao(Chinese Academy of Sciences), Huaxiang Yin(Chinese Academy of Sciences), Haoqing Xu(Chinese Academy of Sciences), Weizhuo Gan(Chinese Academy of Sciences), Qingzhu Zhang(Hebei University of Technology), Jiaxin Yao(Chinese Academy of Sciences), Yanna Luo(Chinese Academy of Sciences), Peng Zhao(Chinese Academy of Sciences), Jie Gu(Chinese Academy of Sciences), Zhenhua Wu(China University of Mining and Technology), Yongqin Wu(Semiconductor Manufacturing International (China)), Lu Peng(State Administration of Cultural Heritage), Kun Luo(Chinese Academy of Sciences), Weihai Bu(Semiconductor Manufacturing International (China))
IEEE Transactions on Electron Devices
September 23, 2022
Cited by 23


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