Ultra-low Leakage IGZO-TFTs with Raised Source/Drain for V<sub>t</sub> > 0 V and I<sub>on</sub> > 30 µA/µm
Subhali Subhechha(IMEC), Gouri Sankar Kar(IMEC), H.F.W. Dekkers(IMEC), L. Magnarin(IMEC), N. Bazzazian(IMEC), Shreya Kundu(IMEC), Shamin Houshmand Sharifi(IMEC), Harinarayanan Puliyalil(Jožef Stefan Institute), A. Belmonte(IMEC), Murat Pak(IMEC), Umberto Celano(Arizona State University), J. Geypen(IMEC), C. Biasotto(IMEC), Hubert Hody(IMEC), Romain Delhougne(IMEC), Surajit Sutar(IMEC), D. Tsvetanova(IMEC), Michiel J. van Setten(IMEC), A. Chasin(IMEC), Dmitry Batuk(IMEC), Nouredine Rassoul(IMEC), Lieve Teugels(IMEC), K. Vandersmissen(IMEC), J. Heijlen(IMEC)
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
June 12, 2022
Cited by 46
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