Optical and structural performance of the Al/Zr reflection multilayers in the 17-19nm region

Qi Zhong, Tonglin Huo(National Synchrotron Radiation Laboratory), Karine Le Guen(Centre National de la Recherche Scientifique), Jean‐Marc André(Centre National de la Recherche Scientifique), Hongjun Zhou(China Rehabilitation Research Center), Qiushi Huang(Tongji University), Haochuan Li(Tongji University), Jingtao Zhu(Fujian Medical University), Zhanshan Wang(Tongji University), Wenbin Li(Tongji University), Zhang Zhong, Philippe Jonnard(Centre National de la Recherche Scientifique)
HAL (Le Centre pour la Communication Scientifique Directe)
April 6, 2012
Cited by 0


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