Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet

Zhanshan Wang(Tongji University), A. G. Michette(King's College London), Fengli Wang(Huazhong University of Science and Technology), A. Gaupp(University of Münster), Bei Wang(Shanghai Jiao Tong University), Zhong Zhang(University of Science and Technology of China), Yao Xu(Tongji University), Jingtao Zhu(Tongji University), Shumin Zhang(Hebei Normal University), Lingyan Chen, Hongchang Wang, A. Keith Powell(King's College London), Wenjuan Wu(Shanghai Public Health Clinical Center), F. Schäfers, Liqin Liu(Xinjiang Agricultural University), Sławka J. Pfauntsch(King's College London)
Applied Physics Letters
January 15, 2007
10.1063/1.2431761
Cited by 36

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