A Study of Al Wiring and Al Gate with A Minimal Sputtering Tool

Shuichi Noda, Shiro Hara(National Institute of Advanced Industrial Science and Technology), Yuuki Yabuta, Masashi Kase, Ryuichiro Kamei, Naoko Yamamoto(Disco (japan)), Hiroyuki Tanaka(The University of Tokyo), Sommawan Khumpuang

The Japan Society of Applied Physics

July 6, 2021

Cited by 0

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