Transfer Learning-Based Artificial Intelligence-Integrated Physical Modeling to Enable Failure Analysis for 3 Nanometer and Smaller Silicon-Based CMOS Transistors

Jieming Pan(National University of Singapore), Aaron Thean(National University of Singapore), Shang Yi Lim(National University of Singapore), Kain Lu Low(National University of Singapore), Evgeny Zamburg(National University of Singapore), Yida Li(National University of Singapore), Jin Feng Leong(National University of Singapore), Chen‐Khong Tham(National University of Singapore), J. Senthilnath(Agency for Science, Technology and Research), Tonio Buonassisi(Massachusetts Institute of Technology), Baoshan Tang(National University of Singapore), Md Meftahul Ferdaus(Agency for Science, Technology and Research), Joydeep Ghosh(TU Wien), Xinghua Wang(National University of Singapore), Savitha Ramasamy(Agency for Science, Technology and Research)
ACS Applied Nano Materials
June 28, 2021
Cited by 46


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