Generation and distribution of residual stress during nano-grinding of monocrystalline silicon

Pei Chen(Beijing University of Technology), Fei Qin(Zhejiang Chinese Medical University), Tong An(Beijing University of Technology), Zhiwei Zhang(Liaocheng University), Huiping Yu(Beijing University of Technology)
Japanese Journal of Applied Physics
November 7, 2018
Cited by 23


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