Micromachined probes with integrated GaAs Schottky diodes for on-wafer temperature sensing
Linli Xie(University of Virginia), Robert M. Weikle(Microprobes (United States)), Souheil Nadri(University of Virginia), N. Scott Barker(University of Virginia), Noah D. Sauber(University of Virginia), Arthur W. Lichtenberger(University of Virginia), Matthew F. Bauwens(University of Virginia), Michael E. Cyberey(University of Virginia), Christopher M. Moore(University of Virginia)
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